発行年月 タイトル 第一著者 共著者 会議名 開催場所 備考
85-01 1985年8月 Minimization of Residual Stress in SOI Films A. Ogura K. Egami and M. Kimura Conference on Solid State Devices and Materials. Tokyo
86-01 1986年8月 Atomic Layer Epitaxy of Uniform GaAs on 3?inch Substrate in Low Pressure MOCVD System K. Mori A. Ogura, M. Yoshida and H. Terao Conference on Solid State Devices and Materials Tokyo
87-01 1987年8月 Gas Source Si?MBE Using SiH4 H. Hirayama T. Tatsumi, A. Ogura and N. Aizaki Conference on Solid State Devices and Materials Tokyo
88-01 1988年5月 High?speed VTR Observation of SOI Laser Annealing A. Ogura N. Aizaki and H. Terao International Workshop on Future Electron Devices ?Three Dimensional Integration Zao, Miyagi
88-02 1988年11月 Interface Structures in Lateral Seeding Epitaxial Si on SiO2 A. Ogura N. Aizaki and H. Terao Fall Meeting of The Materials Research Society Boston
89-01 1989年9月 Si/SiO2 Interface Structures in SOI and Thermally Oxidized S A. Ogura N. Aizaki International Symposium on Passivity Sappora
89-02 1989年10月 Novel Technique for Si Epitaxial Lateral Overgrowth: Tunnel Epitaxy A. Ogura Y. Fujimoto International Workshop on Future Electron Devices Kochi
90-01 1990年5月 Improvement of SiO2/Si Interface Flatness by Post Oxidation Anneal A. Ogura International Symposium on Silicon Materials Science and Technology Tront
90-02 1990年6月 Novel Technique for Si Epitaxial Lateral Overgrowth: Tunnel Epitaxy A. Ogura Y. Fujimoto Annual Conference of the Electronic Material Committee Santa Barbara
91-01 1991年10月 An Investigation on the Cutoff Characteristics of sub-quater-micron SOI MOSFET R, Koh A. Ogura IEEE International SOI Conference Vail, Co
93-01 1993年 Raman spectroscopy of Si cluster A. Ogura H.C. Honea, C.A. Murray, K. Ragavachari, W.O. Sprenger and W.L. Brown Gorden Reserch Conference New Hampshar
93-02 1993年11月 Raman spectroscopy of size selected, matrix isolated Si clusters A. Ogura H.C. Hanea, C.A. Murray, K. Ragavachari, W.O. Sprenger, M.F. Jarrold and W.L. Brown Fall Meeting of The Material research Society Boston
94-01 1994年3月 Raman spectroscopy of matrix-isolated monodisperse Si clusters K. Ragavachari, W.L. Brown, W.O. Sprenger, A. Ogura, E.C. Honea and M.F. JarroldC.A. Murray Meeting of the American Physics Society Florida
95-01 1995年9月 Study on Size Selected, Matrix Isolated Si clusters A. Ogura H.C. Hanea, C.A. Murray, K. Ragavachari, W.O. Sprenger, M.F. Jarrold and W.L. Brown International Symposium on Small Particles and Inorganic Clusters Kobe
95-02 1995年10月 Highly Uniform SOI Fabrication by Appling Voltage during KOH Etching of Bonded Wafers A. Ogura IEEE International SOI Conference Tucson
96-01 1996年4月 Evaluation of the Depth Profile of Defects in SIMOX A. Ogura Spring Meeting of The Material Research Society San Francisco
96-02 1996年8月 Thinning of SOI Bonded Wafers by Applying Voltage during KOH A. Ogura International Conference on Solid State Devices and Materials Yokohama
97-01 1997年8月 Extension of Dose Window for Low Dose SIMOX A. Ogura international Symposium on Silicon-on-insulator Technology and Devices St Luis
97-02 1997年9月 Evaluation of electron trap levels in SIMOX burid oxide by transient photocurrent spectroscopy Y. Miura K. Hamada, T. Kitano and A. Ogura International Conference on Solid State Devices and Materials Hamamatsu
97-03 1997年9月 Precise Measurement of Strain in SOI Induced by Local Oxidation S. Kimura A. Ogura International Conference on Solid State Devices and Materials Hamamatsu
98-01 1998年9月 Oxygen Precipitates and Related Defects in SOI Substrate Fabricated by Wafer Bonding and H+ Splitting A. Ogura M. Tajima International Conference on Solid State Devices and Materials Hiroshima
98-02 1998年10月 Defect Characterization in UNIBOND Wafers by Photoluminescence Spectroscopy and Transmission Electron Microscopy M. Tajima A. Ogura IEEE International SOI Conference Stuart, FL
99-01 1999年5月 Novel SIMOX with BOX at Damage Peak A. Ogura international Symposium on Silicon-on-insulator Technology and Devices Paris
99-02 1999年9月 Measurement of Impurity Distribution Implanted into SOI substrates A. Ogura M. Hiroi International Conference on Solid State Devices and Materials Tokyo
99-03 1999年10月 Evaluation of buried oxide formation in low-dose SIMOX process A. Ogura H. Ono International Symposium on Control of Semiconductor Interfaces Karuizawa
00-01 2000年8月 Evaluation of SOI substrates by positron annihilation A. Ogura A. Uedono, and S. Tanigawa International Conference on Solid State Devices and Materials Sendai
00-02 2000年10月 Photoluminescence Analysis of Annealing Process in Low-Dose SIMOX Wafers M. TajimaS. Ibuka, J. Takiguchi, A. Mizoguchi, and A. Ogura IEEE International SOI Conference Wakefield MA
00-03 2000年10月 LPCVD of TaCN thin film for barrier layer in Cu interconnection A. Hoshino S. Hiiro, and H. Machida, Y. Ohshita, A. Ogura Advanced Metallization Conference Tokyo
00-04 2000年11月 Control of buried oxide formation in low-dose SIMOX process A. Ogura Advanced Science and Technology of Silicon Materials Hawaii invited

 
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