|
発行年月 |
タイトル |
第一著者 |
共著者 |
会議名 |
開催場所 |
備考 |
85-01 |
1985年8月 |
Minimization of Residual Stress in SOI Films |
A. Ogura |
K. Egami and M. Kimura |
Conference on Solid State Devices and Materials. |
Tokyo |
|
86-01 |
1986年8月 |
Atomic Layer Epitaxy of Uniform GaAs on 3?inch Substrate in Low Pressure MOCVD System |
K. Mori |
A. Ogura, M. Yoshida and H. Terao |
Conference on Solid State Devices and Materials |
Tokyo |
|
87-01 |
1987年8月 |
Gas Source Si?MBE Using SiH4 |
H. Hirayama |
T. Tatsumi, A. Ogura and N. Aizaki |
Conference on Solid State Devices and Materials |
Tokyo |
|
88-01 |
1988年5月 |
High?speed VTR Observation of SOI Laser Annealing |
A. Ogura |
N. Aizaki and H. Terao |
International Workshop on Future Electron Devices ?Three Dimensional Integration |
Zao, Miyagi |
|
88-02 |
1988年11月 |
Interface Structures in Lateral Seeding Epitaxial Si on SiO2 |
A. Ogura |
N. Aizaki and H. Terao |
Fall Meeting of The Materials Research Society |
Boston |
|
89-01 |
1989年9月 |
Si/SiO2 Interface Structures in SOI and Thermally Oxidized S |
A. Ogura |
N. Aizaki |
International Symposium on Passivity |
Sappora |
|
89-02 |
1989年10月 |
Novel Technique for Si Epitaxial Lateral Overgrowth: Tunnel Epitaxy |
A. Ogura |
Y. Fujimoto |
International Workshop on Future Electron Devices |
Kochi |
|
90-01 |
1990年5月 |
Improvement of SiO2/Si Interface Flatness by Post Oxidation Anneal |
A. Ogura |
|
International Symposium on Silicon Materials Science and Technology |
Tront |
|
90-02 |
1990年6月 |
Novel Technique for Si Epitaxial Lateral Overgrowth: Tunnel Epitaxy |
A. Ogura |
Y. Fujimoto |
Annual Conference of the Electronic Material Committee |
Santa Barbara |
|
91-01 |
1991年10月 |
An Investigation on the Cutoff Characteristics of sub-quater-micron SOI MOSFET |
R, Koh |
A. Ogura |
IEEE International SOI Conference |
Vail, Co |
|
93-01 |
1993年 |
Raman spectroscopy of Si cluster |
A. Ogura |
H.C. Honea, C.A. Murray, K. Ragavachari, W.O. Sprenger and W.L. Brown |
Gorden Reserch Conference |
New Hampshar |
|
93-02 |
1993年11月 |
Raman spectroscopy of size selected, matrix isolated Si clusters |
A. Ogura |
H.C. Hanea, C.A. Murray, K. Ragavachari, W.O. Sprenger, M.F. Jarrold and W.L. Brown |
Fall Meeting of The Material research Society |
Boston |
|
94-01 |
1994年3月 |
Raman spectroscopy of matrix-isolated monodisperse Si clusters |
K. Ragavachari, W.L. Brown, W.O. Sprenger, A. Ogura, E.C. Honea and M.F. JarroldC.A. Murray |
|
Meeting of the American Physics Society |
Florida |
|
95-01 |
1995年9月 |
Study on Size Selected, Matrix Isolated Si clusters |
A. Ogura |
H.C. Hanea, C.A. Murray, K. Ragavachari, W.O. Sprenger, M.F. Jarrold and W.L. Brown |
International Symposium on Small Particles and Inorganic Clusters |
Kobe |
|
95-02 |
1995年10月 |
Highly Uniform SOI Fabrication by Appling Voltage during KOH Etching of Bonded Wafers |
A. Ogura |
|
IEEE International SOI Conference |
Tucson |
|
96-01 |
1996年4月 |
Evaluation of the Depth Profile of Defects in SIMOX |
A. Ogura |
|
Spring Meeting of The Material Research Society |
San Francisco |
|
96-02 |
1996年8月 |
Thinning of SOI Bonded Wafers by Applying Voltage during KOH |
A. Ogura |
|
International Conference on Solid State Devices and Materials |
Yokohama |
|
97-01 |
1997年8月 |
Extension of Dose Window for Low Dose SIMOX |
A. Ogura |
|
international Symposium on Silicon-on-insulator Technology and Devices |
St Luis |
|
97-02 |
1997年9月 |
Evaluation of electron trap levels in SIMOX burid oxide by transient photocurrent spectroscopy |
Y. Miura |
K. Hamada, T. Kitano and A. Ogura |
International Conference on Solid State Devices and Materials |
Hamamatsu |
|
97-03 |
1997年9月 |
Precise Measurement of Strain in SOI Induced by Local Oxidation |
S. Kimura |
A. Ogura |
International Conference on Solid State Devices and Materials |
Hamamatsu |
|
98-01 |
1998年9月 |
Oxygen Precipitates and Related Defects in SOI Substrate Fabricated by Wafer Bonding and H+ Splitting |
A. Ogura |
M. Tajima |
International Conference on Solid State Devices and Materials |
Hiroshima |
|
98-02 |
1998年10月 |
Defect Characterization in UNIBOND Wafers by Photoluminescence Spectroscopy and Transmission Electron Microscopy |
M. Tajima |
A. Ogura |
IEEE International SOI Conference |
Stuart, FL |
|
99-01 |
1999年5月 |
Novel SIMOX with BOX at Damage Peak |
A. Ogura |
|
international Symposium on Silicon-on-insulator Technology and Devices |
Paris |
|
99-02 |
1999年9月 |
Measurement of Impurity Distribution Implanted into SOI substrates |
A. Ogura |
M. Hiroi |
International Conference on Solid State Devices and Materials |
Tokyo |
|
99-03 |
1999年10月 |
Evaluation of buried oxide formation in low-dose SIMOX process |
A. Ogura |
H. Ono |
International Symposium on Control of Semiconductor Interfaces |
Karuizawa |
|
00-01 |
2000年8月 |
Evaluation of SOI substrates by positron annihilation |
A. Ogura |
A. Uedono, and S. Tanigawa |
International Conference on Solid State Devices and Materials |
Sendai |
|
00-02 |
2000年10月 |
Photoluminescence Analysis of Annealing Process in Low-Dose SIMOX Wafers |
M. TajimaS. Ibuka, J. Takiguchi, A. Mizoguchi, and A. Ogura |
|
IEEE International SOI Conference |
Wakefield MA |
|
00-03 |
2000年10月 |
LPCVD of TaCN thin film for barrier layer in Cu interconnection |
A. Hoshino |
S. Hiiro, and H. Machida, Y. Ohshita, A. Ogura |
Advanced Metallization Conference |
Tokyo |
|
00-04 |
2000年11月 |
Control of buried oxide formation in low-dose SIMOX process |
A. Ogura |
|
Advanced Science and Technology of Silicon Materials |
Hawaii |
invited |