国際会議 08〜09年 2011/4/11 更新
発行年月 タイトル 第一著者 共著者 会議名 開催場所 備考
2008年1月 Evaluation of super-critical thickness strained-Si
on insulator (sc-SSOI) substrate
T. Yoshida D. Kosemura, Y. Kakemura, M. Takei, H. Saito, A. Ogura, T. Shimura, T. Koganesawa, and I. Hirosawa
Fourth Workshop of the Thematic Network on Silicon on Insulator Technology, Devices and Circuits
Ireland  
2008年5月 Evaluation of local strain in Si using UV-Raman spectroscopy A. Ogura D. Kosemura, Y. Kakemura, T. Yoshida,  Euro-MRS 2008, Symposium on Advanced Silicon Materials Research for Electronic and Photovoltaic Applications, France Inveited
2008年5月 Evaluation and control of strain in Si induced by patterned SiN stressor H. Saitoh M. Takei, A. Ogura, T. Koganezawa, I. Hirosawa, M. Kohno, T. Nishita, and T. Nakanish 213th Electrochemical Society Meeting Phoenix  
2008年5月 Chemical Vapor deposition using Pt(PF3)4 and Ni(PF3)4 M. Ishikawa I. Muramoto, H. Machida, S. Imai, A. Ogura, and Y. Ohshita 213th Electrochemical Society Meeting Phoenix  
2008年5月 Application of Synchrotron X-ray Diffraction T. Shimura, T. Inoue, Y. Okamoto, T. Hosoi, A. Ogura, O. Sakata, S. Kimura, H. Edo, S. Iida, and H. Watanabe 213th Electrochemical Society Meeting Phoenix  
2008年5月 Transconductance Enhancement by Utilizing Pattern Dependent Oxidation in Silicon Nanowire Field-Effect Transistors A. Seike T. Tange, I. Sano, Y. Sugiura, I. Tsuchida, H. Ohta, T. Watanabe, D. Kosemura, A. Ogura and I. Ohdomari 213th Electrochemical Society Meeting Phoenix  
2008年6月 Channel-Stress Study on Gate-Size Effects for Damascene-Gate pMOSFETs with Top-Cut Compressive Stress Liner and eSiGe S. Mayuzumi S. Yamakawa, D. Kosemura, M. Takei, J. Wang, T. Ando, Y. Tateshita, M. Tsukamoto, H. Wakabayashi, T. Ohno, A. Ogura and N. Nagashima 2008 Symposium on VLSI Technology and circuit Hawaii  
2008年8月 Evaluation of multi-crystalline silicon substrates with p-n diode array T. Tachibana K. Imai, J. Masuda, A. Ogura, K. Arafune, Y. Ohshita, and  M. Tajima 18th Workshop on Crystalline Silicon Solar Cells & Modules: Materials and Processes Denver  
2008年8月 High Spatial Resolution Evaluation of Strain in High-Performance Si MOSFET by UV-Raman Spectroscopy D. Kosemura M.Takei, T. Yoshida, Y. Kakemura, A. Ogura, R. Shimidzu 21th International Conference on Raman Spectroscopy London Guraduate Student Award
2008年9月 Study of Stress Effect on Replacement Gate Technology with Compressive Stress Liner and eSiGe for pFETs S. Yamakawa, S. Mayuzumi, D. Kosemura, M. Takei, J. Wang, Y. Tateshita, H. Wakabayashi, T. Ohno, A.Ogura, and H. Ansai 2008 International Conference on Simulation of Semiconductor Processes and Devices Hakone  
2008年10月 Study on Stress Memorization by Argon Implantation and Annealing M. Hino K. Nagata, T. Yoshida, D. Kosemura, K. Kakushima, P. Ahmet, K. Tsutsui, N. Sugii, A. Ogura, T. Hattori and H. Iwai 214th Electrochemical Society Meeting Hawaii  
2008年10月 Transconductance Enhancement of Strained <110> and <100> Si Nanowire Channel Field-Effect Transistors I. Tsuchida A. Seike, Y. Sugiura, D. Kosemura, A. Ogura and I. Ohdomari 214th Electrochemical Society Meeting Hawaii  
2008年10月 Application of Synchrotron X-ray Diffraction Methods to Gate Stacks of Advanced MOS devices T. Shimura T. Inoue, Y. Okamoto, T. Hosoi, H. Edo, S. Iida, A. Ogura, and H. Watanabe 214th Electrochemical Society Meeting Hawaii  
2008年10月 Observation of Crystalline Imperfections in Supercritical Thickness Strained Silicon on Insulator Wafers by Synchrotron X-ray Topography T. Shimura T. Inoue, Y. Okamoto, T. Hosoi, H. Edo, S. Iida, A. Ogura, and H. Watanabe 214th Electrochemical Society Meeting Hawaii  
2008年10月 Relationship between grain boundary structures and electrical property in polycrystalline Si for solar cells Koji Fukuda Hideaki Kawai, Koji Arafune, Yoshio Ohshita, Masafumi Yamaguchi, and Atushi Ogura Renewable Energy 2008 Pusan  
2008年10月 New Analysis of Heavily Doped Boron and Arsenic in Shallow Junctions by X-ray Photoelectron Spectroscopy K. Tsutsui, M. Watanabe, Y. Nakagawa, T. Matsuda, T. Yoshida, E. Ikenaga, K. Kakushima, P. Ahmet, H. Nohira,T. Maruizumi, A. Ogura, T. Hattori and H. Iwai ESSDERC2008 Great Britain  
2008年11月 A Comparative Study of the Electrical Characteristics of Sputtered TiN Gate Planar MOSFETs and FinFETs  T. Hayashida Y. X. Liu, T. Matsukawa, K. Endo, S. O’uchi, K. Sakamoto, K. Ishii, J. Tsukada,  Y. Ishikawa, H. Yamauchi, E. Suzuki, A. Ogura, and M. Masahara 2008 International Workshop on Dielectric Thin Films for Future ULSI Devices: Science and Technology  Tokyo  
2008年11月 Evaluation of Transconductance Enhancement of <110> and <100> -Channel Strained Si Nanowire Field-Effect Transistors" A. Seike Ikushin Tsuchida, Daisuke Kosemura, Atsushi Ogura, Takanobu Watanabe, and Iwao Ohdomari 2008 International Workshop on Dielectric Thin Films for Future ULSI Devices: Science and Technology  Tokyo  
2008年11月 Study of Strain Introduction in the Channel of MOSFET with Transparent Dummy Gate and SiN Stressor Daisuke Kosemura  Munehisa Takei, Kohki Nagata, Hiroaki Akamatsu, Masayuki Kohno, Tatsuo Nishita, Toshio Nakanishi, and Atsushi Ogura The 5th International Conference on Advanced Science and Technology of Silicon Materials Hawaii  
2008年11月 Micro-Raman study of channel strain in high performance pFETs with compressive stress liner and eSiGe using damascene gate technology M.Takei D. Kosemura, S. Mayuzumi, A. Ogura The 5th International Conference on Advanced Science and Technology of Silicon Materials Hawaii  
2008年11月 Evaluation of plasma etching damage in Si surface by UV-Raman spectroscopy Hirotaka Kurozaki Daisuke Kosemura,Tetsuya Yoshida,Maki Hattori, Eiichi Nishimura, and Atsushi Ogura The 5th International Conference on Advanced Science and Technology of Silicon Materials Hawaii  
2008年11月 The in-situ measurement of thermal expansion coefficient of thin SiGe layer on Si (001) by XRD Hirokazu Kambayashi Yu Yamamoto  Masato Imai, Yoshiji Miyamura, Kazuhiko Omote, Takane Kobayashi, Atsushi Ogura The 5th International Conference on Advanced Science and Technology of Silicon Materials Hawaii  
2008年11月 Behaviors of ultra thin SiGe layer by annealing Yu Yamamoto Hirokazu Kambayashi, Masato Imai, Yoshiji Miyamura, Kazuhiko Omote, Takane Kobayashi, Atsushi Ogura The 5th International Conference on Advanced Science and Technology of Silicon Materials Hawaii  
2008年11月 Suppression of SiC Surface Roughening during High Temperature Annealing by Atmospheric Control  S. Kinoshita A. Ogura The 5th International Conference on Advanced Science and Technology of Silicon Materials Hawaii  
2008年11月 Investigation of Structural Defects in Strained Si Wafers by Synchrotron X-ray Topography Takayoshi Shimura Tomoyuki Inoue, Takuji Hosoi, Atsushi Ogura, Satoshi Iida, Masataka Umeno, and Heiji Watanabe The 5th International Conference on Advanced Science and Technology of Silicon Materials Hawaii  
2009年5月 Ion Beam Irradiation to Type IV Collagen for Biologic Reactivity Yuichiro  Shiga  Atsushi  Ogura, Hiroshi  Toida, Rena  Ujiie, and Yoshiaki  Suzuki The IUMRS International Conference in Asia 2008 Aaichi  
2009年5月 UV-Raman spectroscopy study on SiO2/Si interface M. Hattori T. Yoshida, D. Kosemura A. Ogura, T. Suwab A. Teramotob T. Hattorib and T. Ohmi 215th Electrochemical Society Meeting San Francisco  
2009年5月 Improvement of CVD SiO2 by post deposition microwave plasma treatment K. Nagata H. Akamatsu, D. Kosemura, T. Yoshida, M. Takei, M. Hattori, A. Ogura, T. Koganezawa, M. Machida, J. Son, I. Hirosawa, T. Siozawa, D. Katayama, Y. Sato and Y. Hirota 215th Electrochemical Society Meeting San Francisco  
2009年8月 Detail analysis of Σ9 grain boundaries in multi-crystalline silicon substrates for solar cell Junichi Masuda Tomihisa Tachibana, Yoshio Ohshita, Koji Arafune, and Atsushi Ogura 19th Workshop on Crystalline Silicon Solar Cells & Modules: Materials and Processes Vail, Co  
2009年8月 Recombination velocities at grain boundaries in polycrystalline silicon Yoshio Ohshita Takuto Kubo, Tmonmihisa Tachinbana, Atsushi Ogura, and Masafumi Yamaguchi 19th Workshop on Crystalline Silicon Solar Cells & Modules: Materials and Processes Vail, Co  
2009年8月 Photoluminescence analysis of impurity precipitation on small angle grain boundaries in multi-crystalline Silicon M. Tajima Y. Iwata, M. Ikebe, I. Yamabe, Y. Phshita and A. Ogura 20th Workshop on Crystalline Silicon Solar Cells & Modules: Materials and Processes Vail, Co  
2009年9月 Evaluation of Strain and Crystal Quality in Si during Shallow Trench Isolation Process Using UV-Raman Spectroscopy Daisuke Kosemura Yoshida Tetsuya1; Maki Hattori1; Toshikazu Mizukoshi2; Atsushi Ogura 13th International Conference on Defects--Recognition, Imaging and Physics in Semiconductors Wheering, West Virginia  
2009年9月 Evaluation of multi-crystalline silicon substrates for solar cells by Raman spectroscopy Michio Tajima Masatoshi Ikebe, Yoshio Ohshita, Atsushi Ogura 13th International Conference on Defects —Recognition, Imaging and Physics in Semiconductors (DRIP XIII)  Wheering, West Virginia  
2009年9月 Observation of Two-Dimensional Distribution of Lattice Inclination and Strain in Strained Si Wafers by Synchrotron X-Ray Topography Takayoshi Shimura Tomoyuki Inoue; Daisuke Shimokawa; Takuji Hosoi; Heiji Watanabe; Atsushi Ogura; Masataka Umeno 13th International Conference on Defects —Recognition, Imaging and Physics in Semiconductors (DRIP XIII)  Wheering, West Virginia  
2009年10月 Evaluation of Multi-crystalline Silicon Substrates for Solar Cells by Raman Spectroscopy   T. Tachibana J. Masuda, A. Ogura, Y. Ohshita and K. Arafune  216th Electrochemical Society Meeting Vienna, Austria  
2009年10月 Electron-phonon Scattering Effect on Strained Si Nanowire FETs at Low Temperature I. Tsuchida A. Seike, H. Takai, J. Masuda, D. Kosemura, A. Ogura, T. Watanabe and I. Ohdomari 216th Electrochemical Society Meeting Vienna, Austria  
2009年10月 Demonstration of Transconductance Enhancement on (110) and (100) Strained-nanowire FETs A. Seike H. Takai, I. Tsuchida, J. Masuda, D. Kosemura, A. Ogura, T. Watanabe and I. Ohdomari 216th Electrochemical Society Meeting Vienna, Austria  
2009年10月 Channel Strain Analysis in High Performance Damascene-gate pMOSFETs by High Spatial Resolution Raman Spectroscopy Munehisa Takei Daisuke Kosemura, Kohki Nagata Hiroaki Akamatsu, Satoru Mayuzumi, Shinya Yamakawa, Hitoshi Wakabayash and Atsushi Ogura 2009 International Conference on Solid State Devices and Materials (SSDM 2009) Sendai  
2009年10月 HAX-PES Study of SiN Film for Charge Storage Layer in High Performance SONOS Type Flash Memory Cell Daisuke Kosemura Munehisa Takei, Kohki Nagata, Hiroaki Akamatsu, Maki Hattori, Daisuke Katayama, Tatsuo Nishita, Toshio Nakanishi, Jin-Young Son, Tomoyuki Koganezawa, Ichiro Hirosawa, Atsushi Ogura 2009 International Conference on Solid State Devices and Materials (SSDM 2009) Sendai  
2009年10月 Evaluation of anisotropic biaxial stress using an immersion 
lens by Raman analysis based on the polarization rules 
Daisuke Kosemura M. Takei, K. Nagata, H. Akamatsu, R. Shimidzu and A. Ogura 2009 International Conference on Solid State Devices and Materials (SSDM 2009) Sendai  
2009年10月 Superiority of ALD TiN with TDMAT Precursor for Metal-Gate MOSFET T. Hayashida K. Endo, Y. X. Liu, T. Matsukawa, S. Ouchi, K. Sakamoto, J. Tsukada, Y. Ishikawa, H. Yamauchi, A. Ogura and M. Masahara 2009 International Conference on Solid State Devices and Materials (SSDM 2009) Sendai  
2009年10月 Experimental investigation of electron-phonon scattering effect I. Tsuchida A. Seike, H. Takai, J. Masuda, D. Kosemura, A. Ogura, T. Watanabe and I. Ohdomari 2009 International Conference on Solid State Devices and Materials (SSDM 2009) Sendai  
2009年10月 Impact of adequate selection of channel direction on (001) and (110) wafer orientation for strained nanowire transistors A. Seike H. Takai, I. Tsuchida, J. Masuda,
D. Kosemura, A. Ogura, T. Watanabe and I. Ohdomari
2009 International Conference on Solid State Devices and Materials (SSDM 2009) Sendai  
2009年10月 GeSbTe-thin film formation by CVD for next generation memory(PCRAM: Phase Change RAM) materials Hideaki Machida Seichi Hamada, Takafumi Horiike, Masato Ishikawa, Atsushi Ogura,Yoshio Ohshita and Takayuki Ohba Advanced Metallization Conference 19th Asian Session Tokyo  
2009年11月 Evaluation of interfacial Layer for Restraint of Fermi Level Pinning Y. Iwashita T. Adachi , K. Itaka , A. Ogura  and T. Chikyow 22nd International Microprocesses and Nanotechnology Conference Sapporo  
2009年11月 Channel Strain Analysis in Damascene-gate pMOSFETs on Si (100) and (110) Substrate by Conventional and Cross-sectional Raman Spectroscopy Munehisa Takei Daisuke Kosemura, Kohki Nagata, Hiroaki Akamatsu, Satoru Mayuzumi, Shinya Ya-makawa, Hitoshi Wakabayashi and Atsushi Ogura 2009 Materials Research Society Fall Meeting Boston