国際会議　06〜07年					2011/4/11 更新
発行年月	タイトル	第一著者	共著者	会議名	開催場所	備考
2006年3月	Measurement of in-plane and depth profiles of strain in strained-Si substrates	D. Kosemura	K. Yamasaki, S. Tanaka, and A. Ogura	Second Workshop of the Thematic Network on Silicon on Insulator technology, devices and circuits	Grenoble, France
2006年5月	Discussion on Issues Toward 450mm Wafer	M. Watanabe	T. Fukuda, A. Ogura, Y. Kirino and M. Kohno	Silicon Materials Science and Technology Simposium X, 209th Meeting of The Electrochemical Society	Denver, Colorado	Invited
2006年9月	Photoluminescence characterization of defects in multi-crystalline silicon wafers	H. Sugimoto	M. Inoue, M. Tajima,  Y. Ohshita, and A. Ogura	21st European Photovoltaic Solar Energy  Conference	Dresden, Germany
2006年7月	Chemical Vapor Deposition of NiSi using Ni(PF3)4 and Si3H8	M. Ishikawa	I. Muramoto, H. Machida, S. Imai, Y. Ohshita and A, Ogura	Asia-Pacific Conference on Semiconducting Silicides	Kyoto
2006年8月	Strain engineering and evaluation in advanced LSI technology	A. Ogura		20th International Conference on Raman Spectroscopy	Yokohama	Invited
2006年9月	W-CVD using biscyclopentadienyltungsten system	S. Imai	T. Kagawa, H. Kurozaki, A. Ogura, M. Ishikawa, I. Muramoto, H. Machida, and Y. Ohshita	Advanced Metallization Conference, Asian Session	Tokyo
2006年9月	Properties of chemical reaction during Ni and Ni-silicide deposition using Ni(PF3)4 and Si3H8	M. Ishikawa	I. Muramoto, H. Machida, S. Imai, A. Ogura, Y. Ohshita	Advanced Metallization Conference, Asian Session	Tokyo
2006年10月	Evaluation of SOI substrates with local or global strain by means of in-plane XRD measurement	Daisuke Kosemura,	Kosuke Yamasaki, Satoshi Tanaka, Yasuto Kakemura, Tetsuya Yoshida, and Atsushi Ogura	IEEE International SOI Conference	Niagara Falls
2006年10月	W-CVD using biscyclopentadienyltungsten system	S. Imai	T. Kagawa, H. Kurozaki, A. Ogura,M. Ishikawa, I. Muramoto, H. Machida, and Y. Ohshita	Advanced Metallization Conference, US Session	San Diego
2006年11月	Evaluation of polycrystalline silicon for solar-cells by small p-n diode array	S. Tanaka	K. Imai, A. Ogura, K. Arafune, H. Kawai, F. Kusuoka, Y. Ohshita, M. Inoue,.M. Tajima	Fall Meeting of The Material research Society	Boston
2006年11月	SiO2/Si Interfacial Lattice Strain Revealed by Extremely Asymmetric X-ray Diffraction	H. Yoshida	K. Akimoto, Y. Ito, T. Emoto, N. Yamamoto, Y. Oshita, A. Ogura	2006 International Workshop on DIELECTRIC THIN FILMS FOR FUTURE ULSI DEVICES: SCIENCE AND TECHNOLOGY	Kawasaki
2006年11月	X-ray photoelectron spectroscopy study on SiO2 formed on several orientated c-Si in high pressure water vapor	N. Yamamoto	S. Tanaka, H. Sai, R. Imai, E. Ikenaga, I. Hirosawa, Y. Oshita, and A. Ogura	2006 International Workshop on DIELECTRIC THIN FILMS FOR FUTURE ULSI DEVICES: SCIENCE AND TECHNOLOGY	Kawasaki
2007年5月	Effective control of strain in SOI by SiN deposition	D. Kosemura	K. Yamasaki, Y. K.akemura, T. Yoshida, A. Ogura, H. Uchida, N. Hattori, and M. Yoshimaru	International Symposium on Silicon-on-insulator Technology and Devices	Chicago
2007年8月	Evaluation of Polycrystalline Silicon Substrates for Solar Cells by TEM	Taihei Kagawa	Satoshi Tanaka, Hirotaka Kurozaki, Atsushi Ogura, Yoshio Ohshita, Koji Arafune, and Toshiko Kuba	Microscopy & Microanalysis 2007 Meeting	Florida
2007年8月	Evaluation on uniformity of polycrystalline silicon substrates for solar cells	K. Imai	A. Ogura, Y. Ohshita, K. Arafune, F. Kusuoka H. Kawai, M. Tajima, M. Inoue	17th Workshop on Crystalline Silicon Solar Cells & Modules: Materials and Processes	Denver
2007年8月	Structures and Properties of Defects in Cast-grown Polycrystalline Silicon	Yoshio Ohshita	Koji Arafune, Hideaki Kawai, Atushi Ogura and Masafumi Yamaguchi	17th Workshop on Crystalline Silicon Solar Cells & Modules: Materials and Processes	Denver
2007年9月	Microscopic and Spectroscopic Mapping of Dislocation-Related　Photoluminescence in Multicrystalline Silicon Wafers	Masaaki Inoue	Hiroki Sugimoto, Michio Tajima, Yoshio Ohshita and Atsushi Ogura	12th International Conference on Defects-Recognition, Imaging and Physics in Semiconductors (DRIP XII)	Berlin
2007年9月	Characterization of strained Si wafers by X-ray diffraction techniques	T. Shimura	K. Kawamura, M. Asakawa, H. Watanabe, K. Yasutake, A. Ogura, K. Fukuda, O. Sakata, and S. Kimura	12th International Conference on Defects-Recognition, Imaging and Physics in Semiconductors (DRIP XII)	Berlin
2007年9月	Evaluation of poly-Si thin film crystallized by solid green laser annealing using UV/Visible Raman spectroscopy	Yasuto Kakemura	Daisuke Kosemura, Tetsuya Yoshida, Atsushi Ogura,  Miyuki Masaki, Kenichiro Nishida, Ryusuke Kawakami, Naoya Yamamoto	12th International Conference on Defects-Recognition, Imaging and Physics in Semiconductors (DRIP XII)	Berlin
2007年9月	Characterization of Strain in for High Performance MOSFETs	Daisuke Kosemura	Yasuto Kakemura, Tetsuya Yoshida, Atsushi Ogura Masayuki Kohno, Tatsuo Nishita, and Toshio Nakanisi	International Conference on Solid State Devices and Materials	Tsukuba, Japan
2007年9月	TiN Gate Work Function Control Using Nitrogen Gas Flow Ratio and RTA-Temperature	Y.X.  Liu	T. Hayashida, T. Matsukawa, K. Endo, M. Masahara, S. O'uchi, K. Sakamato, K. Ishii, J. Tsukada, Y. Ishikawa, H. Yamauchi, A. Ogura, and E. Suzuki	International Conference on Solid State Devices and Materials	Tsukuba, Japan
2007年10月	Chemical Vapor Deposition of Ni-Pt thin film using Pt(PF3)4 and Ni(PF3)4	S. Imai	A. Ogura, M. Ishikawa, I. Muramoto, H. Machida, and Y. Ohshita	Advanced Metallization Conference, Asian Session	Tokyo
2007年11月	Evaluation of Si3N4/Si interface by UV Raman spectroscopy.	T. Yoshida	T. Yoshida, K. Yamasaki, D. Kosemura, Y. Kakemura, T. Aratani, M. Higuchi, S. Sugawa, A. Teramoto, T. Ohmi, T. Hattori, and A. Ogura	9th International Conference on Atomically Controlled Surfaces, Interfaces and Nanostructures	Tokyo
2007年12月	Uniformity of electrical and crystal quality in polycrystalline Si substrates for solar cells	S. Tanaka	K. Imai, T. Kagaw1, A. Ogura, Y. Ohshita, K. Arafune, H. Kawai, F. Kusuoka, M. Tajima, M. Inoue	17th International Photovoltaic Science and Engineering Conference	Fukuoka
2007年12月	Defect structures in cast-grown polycrystalline silicon	Y. Ohshita	K. Arafune, T. Kuba, A. Ogura and M. Yamaguchi	17th International Photovoltaic Science and Engineering Conference	Fukuoka