国際会議 06〜07年 | 2011/4/11 更新 | |||||
発行年月 | タイトル | 第一著者 | 共著者 | 会議名 | 開催場所 | 備考 |
2006年3月 | Measurement of in-plane and depth profiles of strain in strained-Si substrates | D. Kosemura | K. Yamasaki, S. Tanaka, and A. Ogura | Second Workshop of the Thematic Network on Silicon on Insulator technology, devices and circuits | Grenoble, France | |
2006年5月 | Discussion on Issues Toward 450mm Wafer | M. Watanabe | T. Fukuda, A. Ogura, Y. Kirino and M. Kohno | Silicon Materials Science and Technology Simposium X, 209th Meeting of The Electrochemical Society | Denver, Colorado | Invited |
2006年9月 | Photoluminescence characterization of defects in multi-crystalline silicon wafers | H. Sugimoto | M. Inoue, M. Tajima, Y. Ohshita, and A. Ogura | 21st European
Photovoltaic Solar Energy Conference |
Dresden, Germany | |
2006年7月 | Chemical Vapor Deposition of NiSi using Ni(PF3)4 and Si3H8 | M. Ishikawa | I. Muramoto, H. Machida, S. Imai, Y. Ohshita and A, Ogura | Asia-Pacific Conference on Semiconducting Silicides | Kyoto | |
2006年8月 | Strain engineering and evaluation in advanced LSI technology | A. Ogura | 20th International Conference on Raman Spectroscopy | Yokohama | Invited | |
2006年9月 | W-CVD using biscyclopentadienyltungsten system | S. Imai | T. Kagawa, H. Kurozaki, A. Ogura, M. Ishikawa, I. Muramoto, H. Machida, and Y. Ohshita | Advanced Metallization Conference, Asian Session | Tokyo | |
2006年9月 | Properties of chemical reaction during Ni and Ni-silicide deposition using Ni(PF3)4 and Si3H8 | M. Ishikawa | I. Muramoto, H. Machida, S. Imai, A. Ogura, Y. Ohshita | Advanced Metallization Conference, Asian Session | Tokyo | |
2006年10月 | Evaluation of SOI substrates with local or global strain by means of in-plane XRD measurement | Daisuke Kosemura, | Kosuke Yamasaki, Satoshi Tanaka, Yasuto Kakemura, Tetsuya Yoshida, and Atsushi Ogura | IEEE International SOI Conference | Niagara Falls | |
2006年10月 | W-CVD using biscyclopentadienyltungsten system | S. Imai | T. Kagawa, H. Kurozaki, A. Ogura,M. Ishikawa, I. Muramoto, H. Machida, and Y. Ohshita | Advanced Metallization Conference, US Session | San Diego | |
2006年11月 | Evaluation of polycrystalline silicon for solar-cells by small p-n diode array | S. Tanaka | K. Imai, A. Ogura, K. Arafune, H. Kawai, F. Kusuoka, Y. Ohshita, M. Inoue,.M. Tajima | Fall Meeting of The Material research Society | Boston | |
2006年11月 | SiO2/Si Interfacial Lattice Strain Revealed by Extremely Asymmetric X-ray Diffraction | H. Yoshida | K. Akimoto, Y. Ito, T. Emoto, N. Yamamoto, Y. Oshita, A. Ogura | 2006 International Workshop on DIELECTRIC THIN FILMS FOR FUTURE ULSI DEVICES: SCIENCE AND TECHNOLOGY | Kawasaki | |
2006年11月 | X-ray photoelectron spectroscopy study on SiO2 formed on several orientated c-Si in high pressure water vapor | N. Yamamoto | S. Tanaka, H. Sai, R. Imai, E. Ikenaga, I. Hirosawa, Y. Oshita, and A. Ogura | 2006 International Workshop on DIELECTRIC THIN FILMS FOR FUTURE ULSI DEVICES: SCIENCE AND TECHNOLOGY | Kawasaki | |
2007年5月 | Effective control of strain in SOI by SiN deposition | D. Kosemura | K. Yamasaki, Y. K.akemura, T. Yoshida, A. Ogura, H. Uchida, N. Hattori, and M. Yoshimaru | International Symposium on Silicon-on-insulator Technology and Devices | Chicago | |
2007年8月 | Evaluation of Polycrystalline Silicon Substrates for Solar Cells by TEM | Taihei Kagawa | Satoshi Tanaka, Hirotaka Kurozaki, Atsushi Ogura, Yoshio Ohshita, Koji Arafune, and Toshiko Kuba | Microscopy & Microanalysis 2007 Meeting | Florida | |
2007年8月 | Evaluation on uniformity of polycrystalline silicon substrates for solar cells | K. Imai | A. Ogura, Y. Ohshita, K. Arafune, F. Kusuoka H. Kawai, M. Tajima, M. Inoue | 17th Workshop on Crystalline Silicon Solar Cells & Modules: Materials and Processes | Denver | |
2007年8月 | Structures and Properties of Defects in Cast-grown Polycrystalline Silicon | Yoshio Ohshita | Koji Arafune, Hideaki Kawai, Atushi Ogura and Masafumi Yamaguchi | 17th Workshop on Crystalline Silicon Solar Cells & Modules: Materials and Processes | Denver | |
2007年9月 | Microscopic and Spectroscopic Mapping of Dislocation-Related Photoluminescence in Multicrystalline Silicon Wafers | Masaaki Inoue | Hiroki Sugimoto, Michio Tajima, Yoshio Ohshita and Atsushi Ogura | 12th International Conference on Defects-Recognition, Imaging and Physics in Semiconductors (DRIP XII) | Berlin | |
2007年9月 | Characterization of strained Si wafers by X-ray diffraction techniques | T. Shimura | K. Kawamura, M. Asakawa, H. Watanabe, K. Yasutake, A. Ogura, K. Fukuda, O. Sakata, and S. Kimura | 12th International Conference on Defects-Recognition, Imaging and Physics in Semiconductors (DRIP XII) | Berlin | |
2007年9月 | Evaluation of poly-Si thin film crystallized by solid green laser annealing using UV/Visible Raman spectroscopy | Yasuto Kakemura | Daisuke Kosemura, Tetsuya Yoshida, Atsushi Ogura, Miyuki Masaki, Kenichiro Nishida, Ryusuke Kawakami, Naoya Yamamoto | 12th International Conference on Defects-Recognition, Imaging and Physics in Semiconductors (DRIP XII) | Berlin | |
2007年9月 | Characterization of Strain in for High Performance MOSFETs | Daisuke Kosemura | Yasuto Kakemura, Tetsuya Yoshida, Atsushi Ogura Masayuki Kohno, Tatsuo Nishita, and Toshio Nakanisi |
International Conference on Solid State Devices and Materials | Tsukuba, Japan | |
2007年9月 | TiN Gate Work Function Control Using Nitrogen Gas Flow Ratio and RTA-Temperature | Y.X. Liu | T. Hayashida, T. Matsukawa, K. Endo, M. Masahara, S. O'uchi, K. Sakamato, K. Ishii, J. Tsukada, Y. Ishikawa, H. Yamauchi, A. Ogura, and E. Suzuki | International Conference on Solid State Devices and Materials | Tsukuba, Japan | |
2007年10月 | Chemical Vapor Deposition of Ni-Pt thin film using Pt(PF3)4 and Ni(PF3)4 | S. Imai | A. Ogura, M. Ishikawa, I. Muramoto, H. Machida, and Y. Ohshita | Advanced Metallization Conference, Asian Session | Tokyo | |
2007年11月 | Evaluation of Si3N4/Si interface by UV Raman spectroscopy. | T. Yoshida | T. Yoshida, K. Yamasaki, D. Kosemura, Y. Kakemura, T. Aratani, M. Higuchi, S. Sugawa, A. Teramoto, T. Ohmi, T. Hattori, and A. Ogura | 9th International Conference on Atomically Controlled Surfaces, Interfaces and Nanostructures | Tokyo | |
2007年12月 | Uniformity of electrical and crystal quality in polycrystalline Si substrates for solar cells | S. Tanaka | K. Imai, T. Kagaw1, A. Ogura, Y. Ohshita, K. Arafune, H. Kawai, F. Kusuoka, M. Tajima, M. Inoue | 17th International Photovoltaic Science and Engineering Conference | Fukuoka | |
2007年12月 | Defect structures in cast-grown polycrystalline silicon | Y. Ohshita | K. Arafune, T. Kuba, A. Ogura and M. Yamaguchi | 17th International Photovoltaic Science and Engineering Conference | Fukuoka |