Function Device Laboratory

                                             General Information

Aim of our laboratory: Social service and Contribution for human life

  1. We contribute to the human race by progress of science and technology.
    We do not work for our reputation.
    All results and "know-how" disclosed to the public.
  2. Education of students and bring up "engineer"

 



History of "Function Device Laboratory"

 



Policy

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Research Field

 



Laboratory Location

X-ray photoelectron Spectroscopy (XPS)
        Auger electron Spectroscopy (AES)

Semiconductor Analysis Room [room #: H-06] (extension 7766)
    Deep Level Transient Spectroscopy (DLTS)
    Carrier Profiler for wide band-gap material

Clean Room (class 1000) [room #: H-07 A] (extension 7767)
   Excimer Laser Ablation
   High Vacuum Evaporation for Organic Photoniccrystal

Clean Room (class 1000) [room #: H-07 B] (extension 7768)
   Ultra High Vacuum Evaporation

Clean Room (class 1000) [room #: H-07 C] (extension 7769)
   High Vacuum Electron-Beam Evaporation
   Load-lock system (EB evaporation -RF sputtering -Rapid Thermal Annealing)

Clean Room (class 100) [room #: H-07 D] (extension 7770)


 

 

 

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